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Microsphere-assisted fabrication of high aspect-ratio elastomeric micropillars and waveguides

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  • Jungwook Paek

    (Iowa State University)

  • Jaeyoun Kim

    (Iowa State University)

Abstract

High aspect-ratio micropillars are in strong demand for microtechnology, but their realization remains a difficult challenge, especially when attempted with soft materials. Here we present a direct drawing-based technique for fabricating micropillars with poly(dimethylsiloxane). Despite the material’s extreme softness, our technique enables routine realization of micropillars exceeding 2,000 μm in height and 100 in aspect-ratio. It also supports in situ integration of microspheres at the tips of the micropillars. As a validation of the new structure’s utility, we configure it into airflow sensors, in which the micropillars and microspheres function as flexible upright waveguides and self-aligned reflectors, respectively. High-level bending of the micropillar under an airflow and its optical read-out enables mm s−1 scale-sensing resolution. This new scheme, which uniquely integrates high aspect-ratio elastomeric micropillars and microspheres self-aligned to them, could widen the scope of soft material-based microdevice technology.

Suggested Citation

  • Jungwook Paek & Jaeyoun Kim, 2014. "Microsphere-assisted fabrication of high aspect-ratio elastomeric micropillars and waveguides," Nature Communications, Nature, vol. 5(1), pages 1-8, May.
  • Handle: RePEc:nat:natcom:v:5:y:2014:i:1:d:10.1038_ncomms4324
    DOI: 10.1038/ncomms4324
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