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A universal method for in situ control of stoichiometry and termination of epitaxial perovskite films

Author

Listed:
  • Bruce A. Davidson

    (University of British Columbia
    Area Science Park)

  • Aleksandr Yu. Petrov

    (Area Science Park)

  • Fengmiao Li

    (University of British Columbia)

  • Rebecca Pons

    (Max Planck Institute for Solid State Research)

  • Pablo Sosa-Lizama

    (Max Planck Institute for Solid State Research)

  • Hyungki Shin

    (University of British Columbia
    University of British Columbia)

  • Chong Liu

    (University of British Columbia)

  • Pietro Parisse

    (Area Science Park)

  • Piero Torelli

    (Area Science Park)

  • Georg Cristiani

    (Max Planck Institute for Solid State Research)

  • Y. Eren Suyolcu

    (Max Planck Institute for Solid State Research)

  • Peter A. Aken

    (Max Planck Institute for Solid State Research)

  • Gennady Logvenov

    (Max Planck Institute for Solid State Research)

  • Gideok Kim

    (Max Planck Institute for Solid State Research)

  • Xiaoxing Xi

    (Temple University)

  • Eva Benckiser

    (Max Planck Institute for Solid State Research)

  • Ke Zou

    (University of British Columbia
    University of British Columbia)

Abstract

The perovskite ABO3 structure serves as the foundation for diverse functional and quantum materials, yet its applications are hindered by challenges in control of film stoichiometry and the precise construction of interfaces, particularly compared to conventional semiconductors. While a layer-by-layer growth mode is frequently cited, we demonstrate that many transition-metal perovskite oxides self-assemble via an energetically favorable layer-inversion mechanism. This phenomenon can be strategically exploited to fine-tune stoichiometry and surface termination at any point during growth. Layer inversion produces consistent behavior in electron diffraction rocking curves and diffracted-beam intensity oscillations during alternating A- and B-site shuttered growth across various polar and nonpolar surfaces. We introduce a model that accurately interprets these oscillations, enabling an entirely in situ method for precise relative and absolute calibration of multielemental A- and B-site fluxes at the percent level. This approach is successfully applied to the growth of a single-phase high-entropy oxide film.

Suggested Citation

  • Bruce A. Davidson & Aleksandr Yu. Petrov & Fengmiao Li & Rebecca Pons & Pablo Sosa-Lizama & Hyungki Shin & Chong Liu & Pietro Parisse & Piero Torelli & Georg Cristiani & Y. Eren Suyolcu & Peter A. Ake, 2025. "A universal method for in situ control of stoichiometry and termination of epitaxial perovskite films," Nature Communications, Nature, vol. 16(1), pages 1-10, December.
    • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-025-63608-7
    DOI: 10.1038/s41467-025-63608-7
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