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Integration of microbattery with thin-film electronics for constructing an integrated transparent microsystem based on InGaZnO

Author

Listed:
  • Bin Jia

    (Southeast University)

  • Chao Zhang

    (Southeast University)

  • Min Liu

    (Southeast University)

  • Zhen Li

    (Southeast University)

  • Jian Wang

    (Southeast University)

  • Li Zhong

    (Southeast University)

  • Chuanyu Han

    (Xi’an Jiaotong University)

  • Ming Qin

    (Southeast University)

  • Xiaodong Huang

    (Southeast University)

Abstract

A full integration of miniaturized transparent energy device (lithium-ion battery), electronic device (thin-film transistor) and sensing device (photodetector) to form a monolithic integrated microsystem greatly enhances the functions of transparent electronics. Here, InGaZnO is explored to prepare the above devices and microsystem due to its multifunctional properties. A transparent lithium-ion battery with InGaZnO as anode (capacity~9.8 μAh cm−2) is proposed as the on-chip power source. Then, thin-film transistor with InGaZnO as channel (mobility~23.3 cm2 V−1 s−1) and photodetector with InGaZnO as photosensitive layer (responsivity~0.35 A W−1) are also prepared on the substrate for constructing an fully integrated transparent microsystem. Each device displays acceptable performance. Moreover, alternating-current signals can be successfully charged into the lithium-ion battery by using the thin-film transistor as the on-chip rectifier and also the photodetector works well by using the charged battery as the on-chip power, demonstrating collaborative capabilities of each device to achieve systematic functions.

Suggested Citation

  • Bin Jia & Chao Zhang & Min Liu & Zhen Li & Jian Wang & Li Zhong & Chuanyu Han & Ming Qin & Xiaodong Huang, 2023. "Integration of microbattery with thin-film electronics for constructing an integrated transparent microsystem based on InGaZnO," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
  • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-41181-1
    DOI: 10.1038/s41467-023-41181-1
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