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Iontronic pressure sensor with high sensitivity over ultra-broad linear range enabled by laser-induced gradient micro-pyramids

Author

Listed:
  • Ruoxi Yang

    (Hebei University of Technology
    The Pennsylvania State University)

  • Ankan Dutta

    (The Pennsylvania State University)

  • Bowen Li

    (The Pennsylvania State University)

  • Naveen Tiwari

    (The Pennsylvania State University)

  • Wanqing Zhang

    (The Pennsylvania State University)

  • Zhenyuan Niu

    (The Pennsylvania State University)

  • Yuyan Gao

    (The Pennsylvania State University)

  • Daniel Erdely

    (The Pennsylvania State University)

  • Xin Xin

    (The Pennsylvania State University)

  • Tiejun Li

    (Hebei University of Technology
    Hebei University of Science & Technology)

  • Huanyu Cheng

    (The Pennsylvania State University)

Abstract

Despite the extensive developments of flexible capacitive pressure sensors, it is still elusive to simultaneously achieve excellent linearity over a broad pressure range, high sensitivity, and ultrahigh pressure resolution under large pressure preloads. Here, we present a programmable fabrication method for microstructures to integrate an ultrathin ionic layer. The resulting optimized sensor exhibits a sensitivity of 33.7 kPa−1 over a linear range of 1700 kPa, a detection limit of 0.36 Pa, and a pressure resolution of 0.00725% under the pressure of 2000 kPa. Taken together with rapid response/recovery and excellent repeatability, the sensor is applied to subtle pulse detection, interactive robotic hand, and ultrahigh-resolution smart weight scale/chair. The proposed fabrication approaches and design toolkit from this work can also be leveraged to easily tune the pressure sensor performance for varying target applications and open up opportunities to create other iontronic sensors.

Suggested Citation

  • Ruoxi Yang & Ankan Dutta & Bowen Li & Naveen Tiwari & Wanqing Zhang & Zhenyuan Niu & Yuyan Gao & Daniel Erdely & Xin Xin & Tiejun Li & Huanyu Cheng, 2023. "Iontronic pressure sensor with high sensitivity over ultra-broad linear range enabled by laser-induced gradient micro-pyramids," Nature Communications, Nature, vol. 14(1), pages 1-12, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-38274-2
    DOI: 10.1038/s41467-023-38274-2
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    References listed on IDEAS

    as
    1. Pang Zhu & Huifeng Du & Xingyu Hou & Peng Lu & Liu Wang & Jun Huang & Ningning Bai & Zhigang Wu & Nicholas X. Fang & Chuan Fei Guo, 2021. "Skin-electrode iontronic interface for mechanosensing," Nature Communications, Nature, vol. 12(1), pages 1-10, December.
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