IDEAS home Printed from https://ideas.repec.org/a/hin/jnlmpe/586718.html
   My bibliography  Save this article

A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

Author

Listed:
  • Pu Li
  • Yuming Fang

Abstract

This paper presents a new wavelet interpolation Galerkin method for the numerical simulation of MEMS devices under the effect of squeeze film damping. Both trial and weight functions are a class of interpolating functions generated by autocorrelation of the usual compactly supported Daubechies scaling functions. To the best of our knowledge, this is the first time that wavelets have been used as basis functions for solving the PDEs of MEMS devices. As opposed to the previous wavelet-based methods that are all limited in one energy domain, the MEMS devices in the paper involve two coupled energy domains. Two typical electrically actuated micro devices with squeeze film damping effect are examined respectively to illustrate the new wavelet interpolation Galerkin method. Simulation results show that the results of the wavelet interpolation Galerkin method match the experimental data better than that of the finite difference method by about 10%.

Suggested Citation

  • Pu Li & Yuming Fang, 2010. "A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping," Mathematical Problems in Engineering, Hindawi, vol. 2010, pages 1-25, January.
    • Handle: RePEc:hin:jnlmpe:586718
    DOI: 10.1155/2010/586718
    as

    Download full text from publisher

    File URL: http://downloads.hindawi.com/journals/MPE/2010/586718.pdf
    Download Restriction: no
    File URL: http://downloads.hindawi.com/journals/MPE/2010/586718.xml
    Download Restriction: no
    File URL: https://libkey.io/10.1155/2010/586718?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:hin:jnlmpe:586718. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Mohamed Abdelhakeem (email available below). General contact details of provider: https://www.hindawi.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.