IDEAS home Printed from https://ideas.repec.org/a/gam/jeners/v14y2021i22p7462-d674972.html
   My bibliography  Save this article

Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation

Author

Listed:
  • Mariusz Jankowski

    (Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland)

  • Piotr Zając

    (Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland)

  • Piotr Amrozik

    (Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland)

  • Michał Szermer

    (Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland)

  • Cezary Maj

    (Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland)

  • Grzegorz Jabłoński

    (Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland)

  • Jacek Nazdrowicz

    (Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, Poland)

Abstract

In this work, we analysed the difference between the measurement and simulation results of thermal drift of a custom designed capacitive MEMS accelerometer. It was manufactured in X-FAB XMB10 technology together with a dedicated readout circuit in X-FAB XP018 technology. It turned out that the temperature sensitivity of the sensor’s output is nonlinear and particularly strong in the negative Celsius temperature range. It was found that the temperature drift is mainly caused by the MEMS sensor and the influence of the readout circuit is minimal. Moreover, the measurements showed that this temperature dependence is the same regardless of applied acceleration. Simulation of the accelerometer’s model allowed us to estimate the contribution of post-manufacturing mismatch on the thermal drift; for our sensor, the mismatch-induced drift accounted for about 6% of total thermal drift. It is argued that the remaining 94% of the drift could be a result of the presence of residual stress in the structure after fabrication.

Suggested Citation

  • Mariusz Jankowski & Piotr Zając & Piotr Amrozik & Michał Szermer & Cezary Maj & Grzegorz Jabłoński & Jacek Nazdrowicz, 2021. "Thermal Performance of a Capacitive Comb-Drive MEMS Accelerometer: Measurements vs. Simulation," Energies, MDPI, vol. 14(22), pages 1-22, November.
    • Handle: RePEc:gam:jeners:v:14:y:2021:i:22:p:7462-:d:674972
    as

    Download full text from publisher

    File URL: https://www.mdpi.com/1996-1073/14/22/7462/pdf
    Download Restriction: no
    File URL: https://www.mdpi.com/1996-1073/14/22/7462/
    Download Restriction: no
    ---><---

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:gam:jeners:v:14:y:2021:i:22:p:7462-:d:674972. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: MDPI Indexing Manager (email available below). General contact details of provider: https://www.mdpi.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.