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Magnetron Sputter Epitaxy of High-Quality GaN Nanorods on Functional and Cost-Effective Templates/Substrates

Author

Listed:
  • Elena Alexandra Serban

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Justinas Palisaitis

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Muhammad Junaid

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Lina Tengdelius

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Hans Högberg

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Lars Hultman

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Per Ola Åke Persson

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Jens Birch

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

  • Ching-Lien Hsiao

    (Thin Film Physics Division, Department of Physics, Chemistry and Biology (IFM), Linköping University, Linköping SE-58183, Sweden)

Abstract

We demonstrate the versatility of magnetron sputter epitaxy by achieving high-quality GaN nanorods on different substrate/template combinations, specifically Si, SiC, TiN/Si, ZrB 2 /Si, ZrB 2 /SiC, Mo, and Ti. Growth temperature was optimized on Si, TiN/Si, and ZrB 2 /Si, resulting in increased nanorod aspect ratio with temperature. All nanorods exhibit high purity and quality, proved by the strong bandedge emission recorded with cathodoluminescence spectroscopy at room temperature as well as transmission electron microscopy. These substrates/templates are affordable compared to many conventional substrates, and the direct deposition onto them eliminates cumbersome post-processing steps in device fabrication. Thus, magnetron sputter epitaxy offers an attractive alternative for simple and affordable fabrication in optoelectronic device technology.

Suggested Citation

  • Elena Alexandra Serban & Justinas Palisaitis & Muhammad Junaid & Lina Tengdelius & Hans Högberg & Lars Hultman & Per Ola Åke Persson & Jens Birch & Ching-Lien Hsiao, 2017. "Magnetron Sputter Epitaxy of High-Quality GaN Nanorods on Functional and Cost-Effective Templates/Substrates," Energies, MDPI, vol. 10(9), pages 1-13, September.
    • Handle: RePEc:gam:jeners:v:10:y:2017:i:9:p:1322-:d:110683
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