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Laser maskless fast patterning for multitype microsupercapacitors

Author

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  • Yongjiu Yuan

    (Beijing Institute of Technology
    Yangtze Delta Region Academy of Beijing Institute of Technology
    Beijing Institute of Technology Chongqing Innovation Center
    City University of Hong Kong)

  • Xin Li

    (Beijing Institute of Technology
    Yangtze Delta Region Academy of Beijing Institute of Technology
    Beijing Institute of Technology Chongqing Innovation Center)

  • Lan Jiang

    (Beijing Institute of Technology
    Yangtze Delta Region Academy of Beijing Institute of Technology
    Beijing Institute of Technology Chongqing Innovation Center)

  • Misheng Liang

    (Beijing Information Science and Technology University)

  • Xueqiang Zhang

    (Beijing Institute of Technology
    Yangtze Delta Region Academy of Beijing Institute of Technology
    Beijing Institute of Technology Chongqing Innovation Center)

  • Shouyu Wu

    (Beijing Institute of Technology
    Yangtze Delta Region Academy of Beijing Institute of Technology
    Beijing Institute of Technology Chongqing Innovation Center)

  • Junrui Wu

    (Beijing Institute of Technology
    Yangtze Delta Region Academy of Beijing Institute of Technology
    Beijing Institute of Technology Chongqing Innovation Center)

  • Mengyao Tian

    (Beijing Institute of Technology
    Yangtze Delta Region Academy of Beijing Institute of Technology
    Beijing Institute of Technology Chongqing Innovation Center)

  • Yang Zhao

    (School of Chemistry and Chemical Engineering, Beijing Institute of Technology)

  • Liangti Qu

    (Tsinghua University)

Abstract

Downsizing electrode architectures have significant potential for microscale energy storage devices. Asymmetric micro-supercapacitors play an essential role in various applications due to their high voltage window and energy density. However, efficient production and sophisticated miniaturization of asymmetric micro-supercapacitors remains challenging. Here, we develop a maskless ultrafast fabrication of multitype micron-sized (10 × 10 μm2) micro-supercapacitors via temporally and spatially shaped femtosecond laser. MXene/1T-MoS2 can be integrated with laser-induced MXene-derived TiO2 and 1T-MoS2-derived MoO3 to generate over 6,000 symmetric micro-supercapacitors or 3,000 asymmetric micro-supercapacitors with high-resolution (200 nm) per minute. The asymmetric micro-supercapacitors can be integrated with other micro devices, thanks to the ultrahigh specific capacitance (220 mF cm−2 and 1101 F cm−3), voltage windows in series (52 V), energy density (0.495 Wh cm−3) and power density (28 kW cm−3). Our approach enables the industrial manufacturing of multitype micro-supercapacitors and improves the feasibility and flexibility of micro-supercapacitors in practical applications.

Suggested Citation

  • Yongjiu Yuan & Xin Li & Lan Jiang & Misheng Liang & Xueqiang Zhang & Shouyu Wu & Junrui Wu & Mengyao Tian & Yang Zhao & Liangti Qu, 2023. "Laser maskless fast patterning for multitype microsupercapacitors," Nature Communications, Nature, vol. 14(1), pages 1-12, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-39760-3
    DOI: 10.1038/s41467-023-39760-3
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    References listed on IDEAS

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    2. Michael Ghidiu & Maria R. Lukatskaya & Meng-Qiang Zhao & Yury Gogotsi & Michel W. Barsoum, 2014. "Conductive two-dimensional titanium carbide ‘clay’ with high volumetric capacitance," Nature, Nature, vol. 516(7529), pages 78-81, December.
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