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Benchmarking monolayer MoS2 and WS2 field-effect transistors

Author

Listed:
  • Amritanand Sebastian

    (Penn State University)

  • Rahul Pendurthi

    (Penn State University)

  • Tanushree H. Choudhury

    (Penn State University)

  • Joan M. Redwing

    (Penn State University
    Penn State University
    Penn State University)

  • Saptarshi Das

    (Penn State University
    Penn State University
    Penn State University)

Abstract

Here we benchmark device-to-device variation in field-effect transistors (FETs) based on monolayer MoS2 and WS2 films grown using metal-organic chemical vapor deposition process. Our study involves 230 MoS2 FETs and 160 WS2 FETs with channel lengths ranging from 5 μm down to 100 nm. We use statistical measures to evaluate key FET performance indicators for benchmarking these two-dimensional (2D) transition metal dichalcogenide (TMD) monolayers against existing literature as well as ultra-thin body Si FETs. Our results show consistent performance of 2D FETs across 1 × 1 cm2 chips owing to high quality and uniform growth of these TMDs followed by clean transfer onto device substrates. We are able to demonstrate record high carrier mobility of 33 cm2 V−1 s−1 in WS2 FETs, which is a 1.5X improvement compared to the best reported in the literature. Our experimental demonstrations confirm the technological viability of 2D FETs in future integrated circuits.

Suggested Citation

  • Amritanand Sebastian & Rahul Pendurthi & Tanushree H. Choudhury & Joan M. Redwing & Saptarshi Das, 2021. "Benchmarking monolayer MoS2 and WS2 field-effect transistors," Nature Communications, Nature, vol. 12(1), pages 1-12, December.
    • Handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-020-20732-w
    DOI: 10.1038/s41467-020-20732-w
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    Cited by:

    1. Pengfei Yang & Dashuai Wang & Xiaoxu Zhao & Wenzhi Quan & Qi Jiang & Xuan Li & Bin Tang & Jingyi Hu & Lijie Zhu & Shuangyuan Pan & Yuping Shi & Yahuan Huan & Fangfang Cui & Shan Qiao & Qing Chen & Zhe, 2022. "Epitaxial growth of inch-scale single-crystal transition metal dichalcogenides through the patching of unidirectionally orientated ribbons," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    2. Akhil Dodda & Nicholas Trainor & Joan. M. Redwing & Saptarshi Das, 2022. "All-in-one, bio-inspired, and low-power crypto engines for near-sensor security based on two-dimensional memtransistors," Nature Communications, Nature, vol. 13(1), pages 1-12, December.
    3. Thushani Silva & Mirette Fawzy & Amirhossein Hasani & Hamidreza Ghanbari & Amin Abnavi & Abdelrahman Askar & Yue Ling & Mohammad Reza Mohammadzadeh & Fahmid Kabir & Ribwar Ahmadi & Miriam Rosin & Kare, 2022. "Ultrasensitive rapid cytokine sensors based on asymmetric geometry two-dimensional MoS2 diodes," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    4. Xingchen Pang & Yang Wang & Yuyan Zhu & Zhenhan Zhang & Du Xiang & Xun Ge & Haoqi Wu & Yongbo Jiang & Zizheng Liu & Xiaoxian Liu & Chunsen Liu & Weida Hu & Peng Zhou, 2024. "Non-volatile rippled-assisted optoelectronic array for all-day motion detection and recognition," Nature Communications, Nature, vol. 15(1), pages 1-9, December.

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