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Wafer-scale nanofabrication of telecom single-photon emitters in silicon

Author

Listed:
  • Michael Hollenbach

    (Institute of Ion Beam Physics and Materials Research
    Technische Universität Dresden)

  • Nico Klingner

    (Institute of Ion Beam Physics and Materials Research)

  • Nagesh S. Jagtap

    (Institute of Ion Beam Physics and Materials Research
    Technische Universität Dresden)

  • Lothar Bischoff

    (Institute of Ion Beam Physics and Materials Research)

  • Ciarán Fowley

    (Institute of Ion Beam Physics and Materials Research)

  • Ulrich Kentsch

    (Institute of Ion Beam Physics and Materials Research)

  • Gregor Hlawacek

    (Institute of Ion Beam Physics and Materials Research)

  • Artur Erbe

    (Institute of Ion Beam Physics and Materials Research)

  • Nikolay V. Abrosimov

    (Leibniz-Institut für Kristallzüchtung (IKZ))

  • Manfred Helm

    (Institute of Ion Beam Physics and Materials Research
    Technische Universität Dresden)

  • Yonder Berencén

    (Institute of Ion Beam Physics and Materials Research)

  • Georgy V. Astakhov

    (Institute of Ion Beam Physics and Materials Research)

Abstract

A highly promising route to scale millions of qubits is to use quantum photonic integrated circuits (PICs), where deterministic photon sources, reconfigurable optical elements, and single-photon detectors are monolithically integrated on the same silicon chip. The isolation of single-photon emitters, such as the G centers and W centers, in the optical telecommunication O-band, has recently been realized in silicon. In all previous cases, however, single-photon emitters were created uncontrollably in random locations, preventing their scalability. Here, we report the controllable fabrication of single G and W centers in silicon wafers using focused ion beams (FIB) with high probability. We also implement a scalable, broad-beam implantation protocol compatible with the complementary-metal-oxide-semiconductor (CMOS) technology to fabricate single telecom emitters at desired positions on the nanoscale. Our findings unlock a clear and easily exploitable pathway for industrial-scale photonic quantum processors with technology nodes below 100 nm.

Suggested Citation

  • Michael Hollenbach & Nico Klingner & Nagesh S. Jagtap & Lothar Bischoff & Ciarán Fowley & Ulrich Kentsch & Gregor Hlawacek & Artur Erbe & Nikolay V. Abrosimov & Manfred Helm & Yonder Berencén & Georgy, 2022. "Wafer-scale nanofabrication of telecom single-photon emitters in silicon," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-35051-5
    DOI: 10.1038/s41467-022-35051-5
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    References listed on IDEAS

    as
    1. P. Walther & K. J. Resch & T. Rudolph & E. Schenck & H. Weinfurter & V. Vedral & M. Aspelmeyer & A. Zeilinger, 2005. "Experimental one-way quantum computing," Nature, Nature, vol. 434(7030), pages 169-176, March.
    2. Daniel B. Higginbottom & Alexander T. K. Kurkjian & Camille Chartrand & Moein Kazemi & Nicholas A. Brunelle & Evan R. MacQuarrie & James R. Klein & Nicholas R. Lee-Hone & Jakub Stacho & Myles Ruether , 2022. "Optical observation of single spins in silicon," Nature, Nature, vol. 607(7918), pages 266-270, July.
    3. Hansuek Lee & Tong Chen & Jiang Li & Oskar Painter & Kerry J. Vahala, 2012. "Ultra-low-loss optical delay line on a silicon chip," Nature Communications, Nature, vol. 3(1), pages 1-7, January.
    4. F. Fuchs & B. Stender & M. Trupke & D. Simin & J. Pflaum & V. Dyakonov & G. V. Astakhov, 2015. "Engineering near-infrared single-photon emitters with optically active spins in ultrapure silicon carbide," Nature Communications, Nature, vol. 6(1), pages 1-7, November.
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    Cited by:

    1. Pasquale Cilibrizzi & Muhammad Junaid Arshad & Benedikt Tissot & Nguyen Tien Son & Ivan G. Ivanov & Thomas Astner & Philipp Koller & Misagh Ghezellou & Jawad Ul-Hassan & Daniel White & Christiaan Bekk, 2023. "Ultra-narrow inhomogeneous spectral distribution of telecom-wavelength vanadium centres in isotopically-enriched silicon carbide," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    2. Mihika Prabhu & Carlos Errando-Herranz & Lorenzo Santis & Ian Christen & Changchen Chen & Connor Gerlach & Dirk Englund, 2023. "Individually addressable and spectrally programmable artificial atoms in silicon photonics," Nature Communications, Nature, vol. 14(1), pages 1-7, December.

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