IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v13y2022i1d10.1038_s41467-022-35051-5.html
   My bibliography  Save this article

Wafer-scale nanofabrication of telecom single-photon emitters in silicon

Author

Listed:
  • Michael Hollenbach

    (Institute of Ion Beam Physics and Materials Research
    Technische Universität Dresden)

  • Nico Klingner

    (Institute of Ion Beam Physics and Materials Research)

  • Nagesh S. Jagtap

    (Institute of Ion Beam Physics and Materials Research
    Technische Universität Dresden)

  • Lothar Bischoff

    (Institute of Ion Beam Physics and Materials Research)

  • Ciarán Fowley

    (Institute of Ion Beam Physics and Materials Research)

  • Ulrich Kentsch

    (Institute of Ion Beam Physics and Materials Research)

  • Gregor Hlawacek

    (Institute of Ion Beam Physics and Materials Research)

  • Artur Erbe

    (Institute of Ion Beam Physics and Materials Research)

  • Nikolay V. Abrosimov

    (Leibniz-Institut für Kristallzüchtung (IKZ))

  • Manfred Helm

    (Institute of Ion Beam Physics and Materials Research
    Technische Universität Dresden)

  • Yonder Berencén

    (Institute of Ion Beam Physics and Materials Research)

  • Georgy V. Astakhov

    (Institute of Ion Beam Physics and Materials Research)

Abstract

A highly promising route to scale millions of qubits is to use quantum photonic integrated circuits (PICs), where deterministic photon sources, reconfigurable optical elements, and single-photon detectors are monolithically integrated on the same silicon chip. The isolation of single-photon emitters, such as the G centers and W centers, in the optical telecommunication O-band, has recently been realized in silicon. In all previous cases, however, single-photon emitters were created uncontrollably in random locations, preventing their scalability. Here, we report the controllable fabrication of single G and W centers in silicon wafers using focused ion beams (FIB) with high probability. We also implement a scalable, broad-beam implantation protocol compatible with the complementary-metal-oxide-semiconductor (CMOS) technology to fabricate single telecom emitters at desired positions on the nanoscale. Our findings unlock a clear and easily exploitable pathway for industrial-scale photonic quantum processors with technology nodes below 100 nm.

Suggested Citation

  • Michael Hollenbach & Nico Klingner & Nagesh S. Jagtap & Lothar Bischoff & Ciarán Fowley & Ulrich Kentsch & Gregor Hlawacek & Artur Erbe & Nikolay V. Abrosimov & Manfred Helm & Yonder Berencén & Georgy, 2022. "Wafer-scale nanofabrication of telecom single-photon emitters in silicon," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
  • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-35051-5
    DOI: 10.1038/s41467-022-35051-5
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-022-35051-5
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-022-35051-5?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. P. Walther & K. J. Resch & T. Rudolph & E. Schenck & H. Weinfurter & V. Vedral & M. Aspelmeyer & A. Zeilinger, 2005. "Experimental one-way quantum computing," Nature, Nature, vol. 434(7030), pages 169-176, March.
    2. Daniel B. Higginbottom & Alexander T. K. Kurkjian & Camille Chartrand & Moein Kazemi & Nicholas A. Brunelle & Evan R. MacQuarrie & James R. Klein & Nicholas R. Lee-Hone & Jakub Stacho & Myles Ruether , 2022. "Optical observation of single spins in silicon," Nature, Nature, vol. 607(7918), pages 266-270, July.
    3. Hansuek Lee & Tong Chen & Jiang Li & Oskar Painter & Kerry J. Vahala, 2012. "Ultra-low-loss optical delay line on a silicon chip," Nature Communications, Nature, vol. 3(1), pages 1-7, January.
    4. F. Fuchs & B. Stender & M. Trupke & D. Simin & J. Pflaum & V. Dyakonov & G. V. Astakhov, 2015. "Engineering near-infrared single-photon emitters with optically active spins in ultrapure silicon carbide," Nature Communications, Nature, vol. 6(1), pages 1-7, November.
    Full references (including those not matched with items on IDEAS)

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Pasquale Cilibrizzi & Muhammad Junaid Arshad & Benedikt Tissot & Nguyen Tien Son & Ivan G. Ivanov & Thomas Astner & Philipp Koller & Misagh Ghezellou & Jawad Ul-Hassan & Daniel White & Christiaan Bekk, 2023. "Ultra-narrow inhomogeneous spectral distribution of telecom-wavelength vanadium centres in isotopically-enriched silicon carbide," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    2. Mihika Prabhu & Carlos Errando-Herranz & Lorenzo Santis & Ian Christen & Changchen Chen & Connor Gerlach & Dirk Englund, 2023. "Individually addressable and spectrally programmable artificial atoms in silicon photonics," Nature Communications, Nature, vol. 14(1), pages 1-7, December.

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Cunzhi Zhang & Francois Gygi & Giulia Galli, 2023. "Engineering the formation of spin-defects from first principles," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    2. Pasquale Cilibrizzi & Muhammad Junaid Arshad & Benedikt Tissot & Nguyen Tien Son & Ivan G. Ivanov & Thomas Astner & Philipp Koller & Misagh Ghezellou & Jawad Ul-Hassan & Daniel White & Christiaan Bekk, 2023. "Ultra-narrow inhomogeneous spectral distribution of telecom-wavelength vanadium centres in isotopically-enriched silicon carbide," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    3. Kunze Lu & Manlin Luo & Weibo Gao & Qi Jie Wang & Hao Sun & Donguk Nam, 2023. "Strong second-harmonic generation by sublattice polarization in non-uniformly strained monolayer graphene," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    4. G. L. Stolpe & D. P. Kwiatkowski & C. E. Bradley & J. Randall & M. H. Abobeih & S. A. Breitweiser & L. C. Bassett & M. Markham & D. J. Twitchen & T. H. Taminiau, 2024. "Mapping a 50-spin-qubit network through correlated sensing," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    5. Ran Xue & Max Beer & Inga Seidler & Simon Humpohl & Jhih-Sian Tu & Stefan Trellenkamp & Tom Struck & Hendrik Bluhm & Lars R. Schreiber, 2024. "Si/SiGe QuBus for single electron information-processing devices with memory and micron-scale connectivity function," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    6. Kui An & Zilei Liu & Ting Zhang & Siqi Li & You Zhou & Xiao Yuan & Leiran Wang & Wenfu Zhang & Guoxi Wang & He Lu, 2024. "Efficient characterizations of multiphoton states with an ultra-thin optical device," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    7. Nadia O. Antoniadis & Mark R. Hogg & Willy F. Stehl & Alisa Javadi & Natasha Tomm & Rüdiger Schott & Sascha R. Valentin & Andreas D. Wieck & Arne Ludwig & Richard J. Warburton, 2023. "Cavity-enhanced single-shot readout of a quantum dot spin within 3 nanoseconds," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    8. John C. Thomas & Wei Chen & Yihuang Xiong & Bradford A. Barker & Junze Zhou & Weiru Chen & Antonio Rossi & Nolan Kelly & Zhuohang Yu & Da Zhou & Shalini Kumari & Edward S. Barnard & Joshua A. Robinson, 2024. "A substitutional quantum defect in WS2 discovered by high-throughput computational screening and fabricated by site-selective STM manipulation," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    9. Emma Lomonte & Martin A. Wolff & Fabian Beutel & Simone Ferrari & Carsten Schuck & Wolfram H. P. Pernice & Francesco Lenzini, 2021. "Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits," Nature Communications, Nature, vol. 12(1), pages 1-10, December.
    10. Shuai Shi & Biao Xu & Kuan Zhang & Gen-Sheng Ye & De-Sheng Xiang & Yubao Liu & Jingzhi Wang & Daiqin Su & Lin Li, 2022. "High-fidelity photonic quantum logic gate based on near-optimal Rydberg single-photon source," Nature Communications, Nature, vol. 13(1), pages 1-6, December.
    11. Feng, Changchun & Chen, Lin & Zhao, Li-Jun, 2023. "Coherence and entanglement in Grover and Harrow–Hassidim–Lloyd algorithm," Physica A: Statistical Mechanics and its Applications, Elsevier, vol. 626(C).
    12. Adam Johnston & Ulises Felix-Rendon & Yu-En Wong & Songtao Chen, 2024. "Cavity-coupled telecom atomic source in silicon," Nature Communications, Nature, vol. 15(1), pages 1-7, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-35051-5. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.