Advanced Search
MyIDEAS: Login

リソグラフィとitrs

Contents:

Author Info

  • 龜山, 雅臣
Registered author(s):

    Abstract

    ITRSのロードマップ活動は社会的に認知され、半導体以外の産業でもロードマップが策定されるようになった。一方でITRS はIntelロードマップとも呼ばれることがあり、特定企業に有利とその意義に疑問が持たれた事もあった。本論文では半導体産業が発展し続けるために追求する微細化とITRSの現状を議論し、微細化を支えるリソグラフィ技術とITRSのかかわりに触れた後、ITRSの半導体産業内での意義、功罪、そして誰がロードマップで利益を得るかを議論した。現在のように寡占化が進んだ半導体素子製造の業界においてロードマップは、技術での不意打ちを避ける手段として、また研究開発費の低減の手段として業界の勝者に有利で、王者の戦略と言える。

    Download Info

    If you experience problems downloading a file, check if you have the proper application to view it first. In case of further problems read the IDEAS help page. Note that these files are not on the IDEAS site. Please be patient as the files may be large.
    File URL: http://hermes-ir.lib.hit-u.ac.jp/rs/bitstream/10086/18671/1/070iirWP10_06.pdf
    Download Restriction: no

    Bibliographic Info

    Paper provided by Institute of Innovation Research, Hitotsubashi University in its series IIR Working Paper with number 10-06.

    as in new window
    Length: 31p
    Date of creation: Sep 2010
    Date of revision:
    Handle: RePEc:hit:iirwps:10-06

    Contact details of provider:
    Postal: 2-1 Naka, Kunitachi City, Tokyo 186-8601
    Web page: http://www.iir.hit-u.ac.jp/
    More information through EDIRC

    Related research

    Keywords:

    This paper has been announced in the following NEP Reports:

    References

    No references listed on IDEAS
    You can help add them by filling out this form.

    Citations

    Lists

    This item is not listed on Wikipedia, on a reading list or among the top items on IDEAS.

    Statistics

    Access and download statistics

    Corrections

    When requesting a correction, please mention this item's handle: RePEc:hit:iirwps:10-06. See general information about how to correct material in RePEc.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: (Digital Resources Section, Hitotsubashi University Library).

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If references are entirely missing, you can add them using this form.

    If the full references list an item that is present in RePEc, but the system did not link to it, you can help with this form.

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your profile, as there may be some citations waiting for confirmation.

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.