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リソグラフィとitrs

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  • 龜山, 雅臣

Abstract

ITRSのロードマップ活動は社会的に認知され、半導体以外の産業でもロードマップが策定されるようになった。一方でITRS はIntelロードマップとも呼ばれることがあり、特定企業に有利とその意義に疑問が持たれた事もあった。本論文では半導体産業が発展し続けるために追求する微細化とITRSの現状を議論し、微細化を支えるリソグラフィ技術とITRSのかかわりに触れた後、ITRSの半導体産業内での意義、功罪、そして誰がロードマップで利益を得るかを議論した。現在のように寡占化が進んだ半導体素子製造の業界においてロードマップは、技術での不意打ちを避ける手段として、また研究開発費の低減の手段として業界の勝者に有利で、王者の戦略と言える。

Suggested Citation

  • 龜山, 雅臣, 2010. "リソグラフィとitrs," IIR Working Paper 10-06, Institute of Innovation Research, Hitotsubashi University.
    • Handle: RePEc:hit:iirwps:10-06
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