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Simulation-Based Evolution Algorithm for Automated Material Handling System in a Semiconductor Fabrication Plant

In: Proceedings of 2013 4th International Asia Conference on Industrial Engineering and Management Innovation (IEMI2013)

Author

Listed:
  • James T. Lin

    (National Tsing Hua University)

  • Chao-Jung Huang

    (National Tsing Hua University)

Abstract

The automated material handling system (AMHS) in semiconductor industry plays a vital role in reducing wafer cycle times and enhancing fabrication plant productivity. Vehicle allocation for the AMHS is a challenging task because of the complexity of the manufacturing process and the stochasticity introduced by the inherent variability of processing times. This situation is observed especially in 300 mm wafer fabrication plants where the AMHS comprises both interbay and intrabay systems that perform the timely deliveries. To address this issue, we use the optimal computing budget allocation (OCBA) and extend it by adding genetic algorithm (GA). Under this combined approached, the number of iterations of each alternative is determined by OCBA, and then the optimal solution in the domain of feasible solutions is found through GA. This research provides a useful reference for both scholars and practitioners seeking optimal allocation of lithographical resources and number of iterations using random parameters.

Suggested Citation

  • James T. Lin & Chao-Jung Huang, 2014. "Simulation-Based Evolution Algorithm for Automated Material Handling System in a Semiconductor Fabrication Plant," Springer Books, in: Ershi Qi & Jiang Shen & Runliang Dou (ed.), Proceedings of 2013 4th International Asia Conference on Industrial Engineering and Management Innovation (IEMI2013), edition 127, pages 1035-1046, Springer.
    • Handle: RePEc:spr:sprchp:978-3-642-40060-5_99
    DOI: 10.1007/978-3-642-40060-5_99
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    Keywords

    AMHS; GA; OCBA;
    All these keywords.

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