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A Study Of Femtosecond Laser Polishing Of Cvd Nanopolycrystalline Diamond Films

Author

Listed:
  • YU-XIAO CUI

    (School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, P. R. China)

  • PING GUO

    (School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, P. R. China)

  • XUEMING ZHU

    (School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, P. R. China)

  • YAN-LING TIAN

    (#x2020;School of Mechanical Engineering, Tianjin University, Tianjin 300072, P. R. China)

  • DA-WEI ZHANG

    (#x2020;School of Mechanical Engineering, Tianjin University, Tianjin 300072, P. R. China)

  • HOU-JUN QI

    (School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, P. R. China)

Abstract

Femtosecond (fs) laser ablation has been recognized as an effective and promising technique for high-precision processing of natural and synthesized diamond. In this work, a study of femtosecond laser polishing for nanopolycrystalline diamond (NCD) films by chemical vapor deposition (CVD) is reported. The laser irradiation is induced by 200-fs laser pulses with a repetition frequency of 50MHz, and various laser fluences are employed to investigate their polishing effectiveness. The results show that the optimal laser fluence is 0.7J/cm2, at which the nanodiamond grains on top of the cauliflower-like clusters of NCD films can be ablated. With such laser fluence, the mean surface roughness of NCD films reduces from 73.84nm to 31.88nm, which presents a 57% reduction. Nevertheless, when the laser fluence rises beyond 0.7J/cm2, large amount of amorphous carbon (a-C) balls and porous lava-like morphology would come into being, resulting in severe degradation of the NCD surface.

Suggested Citation

  • Yu-Xiao Cui & Ping Guo & Xueming Zhu & Yan-Ling Tian & Da-Wei Zhang & Hou-Jun Qi, 2021. "A Study Of Femtosecond Laser Polishing Of Cvd Nanopolycrystalline Diamond Films," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 28(04), pages 1-7, April.
    • Handle: RePEc:wsi:srlxxx:v:28:y:2021:i:04:n:s0218625x21500232
    DOI: 10.1142/S0218625X21500232
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