IDEAS home Printed from https://ideas.repec.org/a/wsi/srlxxx/v27y2020i11ns0218625x2050002x.html
   My bibliography  Save this article

Cu–W FILM STRUCTURE INFLUENCED BY Ar+ ENERGY AND LOW-ENERGY BEAM FLOW BOMBARD DURING PREPARATION BY TWO-ION-BEAM SPUTTERING

Author

Listed:
  • YONG-PING AI

    (New Low-Carbon Green Building Materials Institute, Electromechanical Engineering College, Jinggangshan University, Ji’an, Jiangxi 343009, P. R. China)

  • SHI-KUN XIE

    (New Low-Carbon Green Building Materials Institute, Electromechanical Engineering College, Jinggangshan University, Ji’an, Jiangxi 343009, P. R. China)

Abstract

The influences of Ar+ energy and low-energy sputtering on the structure of Cu–W thin film prepared by double-ion-beam sputtering are studied. Results show that the Cu–W thin film sputtered by ion beam onto a Cu substrate is in the form of an amorphous tungsten framework mechanically mixed with Cu grains when the Cu-target Ar+ energy is within 1–2keV and the W-target Ar+ energy is 3keV. The Cu grain size increases slightly, increasing the Cu-target Ar+ energy. When the Ar+ energy increases to the critical value (≈1.5keV), a small amount of Cu is transformed into a single crystal, forming a solid solution with the melting of W. Due to crystal defects and lattice distortion, there is a small shift in the Cu diffraction peak.

Suggested Citation

  • Yong-Ping Ai & Shi-Kun Xie, 2020. "Cu–W FILM STRUCTURE INFLUENCED BY Ar+ ENERGY AND LOW-ENERGY BEAM FLOW BOMBARD DURING PREPARATION BY TWO-ION-BEAM SPUTTERING," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 27(11), pages 1-5, November.
    • Handle: RePEc:wsi:srlxxx:v:27:y:2020:i:11:n:s0218625x2050002x
    DOI: 10.1142/S0218625X2050002X
    as

    Download full text from publisher

    File URL: http://www.worldscientific.com/doi/abs/10.1142/S0218625X2050002X
    Download Restriction: Access to full text is restricted to subscribers
    File URL: https://libkey.io/10.1142/S0218625X2050002X?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:wsi:srlxxx:v:27:y:2020:i:11:n:s0218625x2050002x. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Tai Tone Lim (email available below). General contact details of provider: http://www.worldscinet.com/srl/srl.shtml .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.