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Numerical Study On Bonding Of Pmma Nanochannels

Author

Listed:
  • XUE YANG

    (School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130012, P. R. China)

  • KAI CHEN

    (#x2020;School of Mechanical Engineering, Liaoning Technical University, Fuxin 123000, P. R. China)

  • ZHIFU YIN

    (School of Mechanical and Aerospace Engineering, Jilin University, Changchun 130012, P. R. China)

  • HELIN ZOU

    (#x2021;Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian 116024, P. R. China)

  • TENGFEI YU

    (#xA7;Tangshan Research Institute Co., Ltd., China Coal Science and Engineering Group, Tangshan 063012, P. R. China)

Abstract

Polymethyl Methacrylate (PMMA) nanochannels are becoming increasingly important for biological, optical and electronic applications. To form a complete PMMA nanochannel/device, the open nanotrench will always be thermal bonded. However, the bonding process which influences the final fabrication precision of PMMA devices has not yet been studied systematically by numerical simulation. In this work, an elastic–plastic model was used for PMMA nanochannel bonding. The influence of temperature, pressure, aspect ratio, and friction coefficient on the dimension loss and max stress was studied systematically. By numerical simulation, all the main influence factors were optimized. It is expected that the proposed simulation method has a high potential for the polymer bonding process analysis.

Suggested Citation

  • Xue Yang & Kai Chen & Zhifu Yin & Helin Zou & Tengfei Yu, 2020. "Numerical Study On Bonding Of Pmma Nanochannels," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 27(09), pages 1-6, September.
    • Handle: RePEc:wsi:srlxxx:v:27:y:2020:i:09:n:s0218625x19502135
    DOI: 10.1142/S0218625X19502135
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