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STRUCTURE AND PROPERTIES OF NONHYDROGEN GexC1−x FILMS PREPARED BY PLD

Author

Listed:
  • YONG CHENG

    (Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China)

  • GUOJUN HUANG

    (Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China)

  • YIMIN LU

    (Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China)

  • YANLONG GUO

    (Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China)

  • CHAOWEI MI

    (Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China)

  • HAIYUAN CAO

    (Opto-Electronics Facility, Wuhan Mechanical College, Wuhan 430075, P. R. China)

Abstract

Nonhydrogen germanium carbide (GexC1−x) films were prepared by KrF pulsed lasers deposition (PLD), and the effects of different germanium contents on the microstructures, optical properties and adhesion properties of the GexC1−x films were studied. XRD measurements showed that the GexC1−x films with different germanium contents were of amorphous structure. XPS analysis showed that the C/Ge atomic ratios of GexC1−x films were close to those of corresponding targets. The intensity of Ge3d peak in the GexC1−x films increased and the intensity of C1s peak decreased with the increase of the germanium content. The GexC1−x films’ sp3C bond contents increased from 46.4% to 69.7%. Ellipsometry and infrared transmission spectral measurements showed that the refractive index of GexC1−x films increased from 2.5 to 3.5 at the wavelength of 1μm with the increase of germanium content. The extinction coefficient of GexC1−x film was of the order of 10−3 in the infrared band when the germanium content was less than 10at.%. The adhesion tests showed that the adhesion performances of GexC1−x films were better when the germanium content increased.

Suggested Citation

  • Yong Cheng & Guojun Huang & Yimin Lu & Yanlong Guo & Chaowei Mi & Haiyuan Cao, 2018. "STRUCTURE AND PROPERTIES OF NONHYDROGEN GexC1−x FILMS PREPARED BY PLD," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 25(07), pages 1-7, October.
    • Handle: RePEc:wsi:srlxxx:v:25:y:2018:i:07:n:s0218625x19500185
    DOI: 10.1142/S0218625X19500185
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