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METAL-DOPEDZnOTHIN FILMS: SYNTHESIS, ETCHING CHARACTERISTIC, AND APPLICATION TEST FOR ORGANIC LIGHT EMITTING DIODE (OLED) DEVICES

Author

Listed:
  • SANG-HUN NAM

    (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon 440-746, Korea)

  • MYOUNG-HWA KIM

    (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon 440-746, Korea)

  • DONG GEUN YOO

    (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon 440-746, Korea)

  • SEONG HUN JEONG

    (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon 440-746, Korea)

  • DOO YONG KIM

    (School of Materials Engineering, Sungkyunkwan University, Suwon 440-746, Korea)

  • NAE-EUNG LEE

    (School of Materials Engineering, Sungkyunkwan University, Suwon 440-746, Korea)

  • J.-H. BOO

    (Department of Chemistry and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon 440-746, Korea)

Abstract

Metal-dopedZnOfilms with various metal contents (Al,AgandLiof 0–10 wt.%) were prepared by RF magnetron sputtering system with specially designedZnOtargets. The structural, optical and electrical properties of MZO films depended on the type and content of doping in target. Electrical resistivity of LZO thin films increased with increasingLidoping amounts between 0 and 4 wt.%, suggesting that an epitaxial LZO film has high resistivity. We observed morphology in pureZnOfilms by using different etchant. In addition, etching rate were contrasted with the etchant concentration and pH. The etching rate is proportional exponentially to pH value. These data will be the technical basis for TCO application. Also, the dry etching rate decreased with increasing theCl2concentration inCH4/H2/Ar+ additiveCl2gas mixture but metal dopants were etched effectively.

Suggested Citation

  • Sang-Hun Nam & Myoung-Hwa Kim & Dong Geun Yoo & Seong Hun Jeong & Doo Yong Kim & Nae-Eung Lee & J.-H. Boo, 2010. "METAL-DOPEDZnOTHIN FILMS: SYNTHESIS, ETCHING CHARACTERISTIC, AND APPLICATION TEST FOR ORGANIC LIGHT EMITTING DIODE (OLED) DEVICES," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 17(01), pages 121-127.
    • Handle: RePEc:wsi:srlxxx:v:17:y:2010:i:01:n:s0218625x10014065
    DOI: 10.1142/S0218625X10014065
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