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NANOCOMPOSITEnc-TiC/a-C:HFILMS FABRICATED BY DUAL PLASMA TECHNIQUE

Author

Listed:
  • YAOHUI WANG

    (Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XU ZHANG

    (Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • YUANZHI XU

    (Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XIANYING WU

    (Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • HUIXING ZHANG

    (Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

  • XIAOJI ZHANG

    (Key Laboratory of Beam Technology and Material Modification of Ministry of Education, Institution of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, 100875 Beijing, China)

Abstract

Nanocompositenc-TiC/a-C:Hfilms have been deposited via filtered cathodic vacuum arc technique, employingTitarget andC2H2gas as material precursors. The composition and nanostructure of film, correlated to mechanical and tribological properties of film, are varied by changingC2H2flow rate and filter coil current. Glancing angle X-ray diffraction has been used to show that salientTiC(111) peak exists in film with grain size of order of 8–10 nm, as a function of filter coil current. Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) investigations demonstrate that thenc-TiC/a-C:Hfilms mainly contain nanocrystalline graphite and sp2-bonded carbon, both as a function ofC2H2flow rate. Mechanical tests confirm that thenc-TiC/a-C:Hfilms possess superior hardness of 33.9 GPa and elastic modulus of 237.6 GPa.

Suggested Citation

  • Yaohui Wang & Xu Zhang & Yuanzhi Xu & Xianying Wu & Huixing Zhang & Xiaoji Zhang, 2007. "NANOCOMPOSITEnc-TiC/a-C:HFILMS FABRICATED BY DUAL PLASMA TECHNIQUE," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(05), pages 891-897.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:05:n:s0218625x07010536
    DOI: 10.1142/S0218625X07010536
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