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Mechanical Behaviors Of Quenched Iron Film Sputtering Deposited On Glass Substrate

Author

Listed:
  • YONG-JU ZHANG

    (Department of Physics, Taizhou University, Linhai 317000, China)

  • SEN-JIANG YU

    (Department of Physics, China Jiliang University, Hangzhou 310018, China;
    Department of Physics, Zhejiang University, Hangzhou 310027, China)

  • PING-GEN CAI

    (Department of Physics, Zhejiang University, Hangzhou 310027, China)

  • HONG ZHOU

    (Department of Physics, China Jiliang University, Hangzhou 310018, China)

Abstract

A characteristic wedge-shaped iron(Fe)film system, deposited on glass substrate by a DC-magnetron sputtering method and quenched by silicone oil during deposition, has been successfully fabricated. The mechanical behaviors of the quenched and non-quenchedFefilms have been compared and analyzed. The internal stress is found to transform from tension to compression in nature after quenching, which results in the formation of buckling pattern in the quenchedFefilm while crack pattern in the non-quenched film. It is proposed that the origin of the compressive stress is mainly due to freezing of theFeatoms (or clusters) with high kinetic energy and doping of the oil molecules into theFefilm defects.

Suggested Citation

  • Yong-Ju Zhang & Sen-Jiang Yu & Ping-Gen Cai & Hong Zhou, 2007. "Mechanical Behaviors Of Quenched Iron Film Sputtering Deposited On Glass Substrate," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(05), pages 879-884.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:05:n:s0218625x07010366
    DOI: 10.1142/S0218625X07010366
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