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STRUCTURAL AND OPTICAL PROPERTIES OFZnOTHIN FILMS GROWN ON FLEXIBLE POLYIMIDE SUBSTRATES

Author

Listed:
  • DONG ICK SON

    (Department of Information Display Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea)

  • JUNG WOOK LEE

    (Division of Electronics and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea)

  • DEA UK LEE

    (Division of Electronics and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea)

  • TAE WHAN KIM

    (Division of Electronics and Computer Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791, Korea)

  • WON KOOK CHOI

    (Korea Institute of Science and Technology, Thin Film Materials Research Center, Seoul 130-650, Korea)

Abstract

Nominally undopedZnOthin films were grown on polyimide (PI) substrates at various temperatures by using radio-frequency magnetron sputtering. Atomic force microscopy images showed that the root mean squares of the average surface roughnesses for theZnOthin films grown on the PI substrates at 27°C, 100°C, 200°C, and 300°C were 4.08, 4.50, 4.18, and 3.89 nm, respectively. X-ray diffraction patterns showed that the crystallinity of theZnOfilms had a preferential (0001) direction and that the full width at half-maxima for the (0002)ZnOdiffraction peak for theZnOthin films grown on the PI substrates at 27°C, 100°C, 200°C, and 300°C were 0.22, 0.22, 0.22, and 0.23, respectively. The average optical transmittances in the visible ranges between 550 and 750 nm for theZnO/PI heterostructures grown at 27°C, 100°C, 200°C, and 300°C were 87%, 83%, 87%, and 78%, respectively.

Suggested Citation

  • Dong Ick Son & Jung Wook Lee & Dea Uk Lee & Tae Whan Kim & Won Kook Choi, 2007. "STRUCTURAL AND OPTICAL PROPERTIES OFZnOTHIN FILMS GROWN ON FLEXIBLE POLYIMIDE SUBSTRATES," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(04), pages 801-805.
    • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:04:n:s0218625x07010287
    DOI: 10.1142/S0218625X07010287
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