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MAGNETRON SPUTTERING DEPOSITION OF POLYCRYSTALLINECrN/ZrNSUPERLATTICE COATINGS

Author

Listed:
  • M. X. WANG

    (College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China)

  • J. J. ZHANG

    (College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China)

  • Q. X. LIU

    (College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China)

  • D. J. LI

    (College of Physics and Electronic Information Science, Tianjin Normal University, Tianjin 300074, China)

Abstract

The influence of substrate rotary speed, species of reaction gases and flows on nanoindentation, nanoscratch fracture, and residual stress were explored on reactive sputtered nanoscaleCrN/ZrNmultilayered coatings. Hardness and critical fracture load as high as 32 GPa and 85 mN with desirable compressive stress were achieved for this model. A proper percentage ofNH3inN2reaction gas was also proved to be of benefit to synthesize high-hard and fracture-resistantCrN/ZrNcoatings. The low-angle XRD patterns provided the layer modulation period of the coatings. A marked polycrystallite of two-cubicNaClphaseCrN+ZrNas well as probably hexagonalCr2Nwith small modulation period corresponded to the enhanced mechanical properties.

Suggested Citation

  • M. X. Wang & J. J. Zhang & Q. X. Liu & D. J. Li, 2006. "MAGNETRON SPUTTERING DEPOSITION OF POLYCRYSTALLINECrN/ZrNSUPERLATTICE COATINGS," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 13(02n03), pages 173-177.
    • Handle: RePEc:wsi:srlxxx:v:13:y:2006:i:02n03:n:s0218625x06008177
    DOI: 10.1142/S0218625X06008177
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