Author
Listed:
- Y. TAKIZAWA
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- T. IKEDA
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- T. OKU
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- C. OTANI
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- K. KAWAI
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- H. SATO
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- H. M. SHIMIZU
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- H. MIKAMI
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- H. MIYASAKA
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
- H. WATANABE
(Division of Image Information, RIKEN, 2-1 Hirosawa, Wako-shi, Saitama 351-0198, Japan)
Abstract
Superconducting tunnel junctions (STJs) are applicable to as photon detectors with an energy resolution and a high photon-counting rate. The absorption of a photon in the superconductor of the STJ generates a number of quasiparticles that is proportional to the photon energy. Especially for soft X-ray and extreme ultraviolet (EUV) applications, STJs have good performance because of their high absorption efficiency below 1 keV. We are developing an energy-dispersive photon detector for EUV radiation using STJs with Al trapping layers. We evaluated the performance of the detector for EUV photons by using the Synchrotron Facility at KEK-PF in Tsukuba, Japan. We achieved an energy resolution of FWHM=18 eV (including the external noise of 17.6 eV) for 55 eV EUV photons with a100 × 100 μm2STJ. We present details of the junction design and discuss our experiments and the results.
Suggested Citation
Y. Takizawa & T. Ikeda & T. Oku & C. Otani & K. Kawai & H. Sato & H. M. Shimizu & H. Mikami & H. Miyasaka & H. Watanabe, 2002.
"Development Of Superconducting Tunnel Junctions For Euv Detectors,"
Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 9(01), pages 561-565.
Handle:
RePEc:wsi:srlxxx:v:09:y:2002:i:01:n:s0218625x02002646
DOI: 10.1142/S0218625X02002646
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