The influence of deposition parameters on production of soft Fe $\mathsf{_{81}}$ Co $\mathsf{_{13.5}}$ Si $\mathsf{_{3.5}}$ C $\mathsf{_{2}}$ and Fe $\mathsf{_{67}}$ Co $\mathsf{_{18}}$ Si $\mathsf{_{1}}$ B $\mathsf{_{14}}$ films

Production parameters are important for the production of desirable type of magnetic materials. The feasibility of low coercivity amorphous films production using a novel rotating cryostat (RC) technique for sensor application was investigated. Fe 81 Co 13.5 Si 3.5 C 2 and Fe 67 Co 18 Si 1 B 14 amorphous films was vaporised using a resistively heated furnace on to a liquid nitrogen cooled polyimide Kapton $^{\rm TM}$ substrate rotated at the speed of 1300 rpm. The Orthogonal design process was applied in order to systematically optimise the deposition process and parameters over the output functions for the production of low coercivity films. The results indicate that the process can be easily optimised at these level settings with the goal of having the low coercivity amorhous films. By comparing the output function differences with standard deviation for coercivity, the effects of all input parameters (furnace shape, furnace power, mass of material and the gap between substrate and source) on coercivity values of films were analysed. Furthermore, the amorphous nature of these films was confirmed by X-ray measurement. Copyright Springer-Verlag Berlin/Heidelberg 2004