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Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy

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  • John P Giannini
  • Andrew G York
  • Hari Shroff

Abstract

We describe a method to speed up microelectromechanical system (MEMS) mirror scanning by > 20x, while also improving scan accuracy. We use Landweber deconvolution to determine an input voltage which would produce a desired output, based on the measured MEMS impulse response. Since the MEMS is weakly nonlinear, the observed behavior deviates from expectations, and we iteratively improve our input to minimize this deviation. This allows customizable MEMS angle vs. time with

Suggested Citation

  • John P Giannini & Andrew G York & Hari Shroff, 2017. "Anticipating, measuring, and minimizing MEMS mirror scan error to improve laser scanning microscopy's speed and accuracy," PLOS ONE, Public Library of Science, vol. 12(10), pages 1-14, October.
    • Handle: RePEc:plo:pone00:0185849
    DOI: 10.1371/journal.pone.0185849
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