Optimal reduction of a spatial monitoring grid: Proposals and applications in process control
AbstractDeposition of silicon dioxide (SiO2) is a critical step of integrated circuit manufacturing; hence it is monitored during the manufacturing process at a grid of points defined on the wafer area. Since collecting thickness measurements is expensive, it is a compelling issue to investigate how a sub grid can be identified. A strategy based on spatial prediction and simulating annealing is proposed to tackle the problem which proved to be effective when applied to a real process. A diagnostic device for monitoring the deposition process is also discussed which can be usefully adopted in the day-to-day activity by practitioners acting in process control of a microelectronics fab.
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Bibliographic InfoArticle provided by Elsevier in its journal Computational Statistics & Data Analysis.
Volume (Year): 58 (2013)
Issue (Month): C ()
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Web page: http://www.elsevier.com/locate/csda
Kriging; Simulated annealing; Spatial sampling; Statistics for microelectronics;
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