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SYNTHESIS OF DIAMOND-LIKE CARBON FILMS USING A BI-MODAL SPUTTER DEPOSITION WITHXeIONS

Author

Listed:
  • MAKSYM RYBACHUK

    (Faculty of Built Environment and Engineering, Queensland University of Technology, Gardens Point, 2 George St., Brisbane Qld 4001, Australia)

  • JOHN M. BELL

    (Faculty of Built Environment and Engineering, Queensland University of Technology, Gardens Point, 2 George St., Brisbane Qld 4001, Australia)

Abstract

An alternative approach to a sputtering process was examined where a single incident beam ofXeions was used to simultaneously sputter a carbon target and bombard a growing film. The hypothesis that by positioning a substrate at grazing angles to the central axis of the ion beam, the additional energy provided will be beneficial to the formation of sp3bonding. Amorphous carbon (a-C) and diamond-like carbon (DLC) films were synthesized by sputtering a graphite target from a Kaufmann-type ion source. Experimental results revealed that when a substrate was placed at grazing angles due to a secondary resputtering process, it was not possible to fabricate DLCs but only sp2-rich polymerica-C. For DLC synthesis the optimal angles of the target and the substrate to the ion flux were found to be 30° and 0°, respectively, and the ion energies of 0.8–1 keV.

Suggested Citation

  • Maksym Rybachuk & John M. Bell, 2007. "SYNTHESIS OF DIAMOND-LIKE CARBON FILMS USING A BI-MODAL SPUTTER DEPOSITION WITHXeIONS," Surface Review and Letters (SRL), World Scientific Publishing Co. Pte. Ltd., vol. 14(04), pages 735-738.
  • Handle: RePEc:wsi:srlxxx:v:14:y:2007:i:04:n:s0218625x07010081
    DOI: 10.1142/S0218625X07010081
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