Advanced Search
MyIDEAS: Login

Influence Of Plasma Pretreatment In The Formation Of Diamond-Like Carbon Thin Films

Contents:

Author Info

  • R. MAHESWARAN

    (Center for Materials Science and Nanodevices, Department of Physics, SRM University, Kattankulathur-603 203, India)

  • SHIVARAMAN RAMASWAMY

    (Nanotechnology Research Center, SRM University, Kattankulathur-603 203, India)

  • OJAS MAHAPATRA

    (Nanotechnology Research Center, SRM University, Kattankulathur-603 203, India)

  • B. PURNACHANDRA RAO

    (Center for Materials Science and Nanodevices, Department of Physics, SRM University, Kattankulathur-603 203, India)

  • C. GOPALAKRISHNAN

    (Nanotechnology Research Center, SRM University, Kattankulathur-603 203, India)

  • D. JOHN THIRUVADIGAL

    () (Center for Materials Science and Nanodevices, Department of Physics, SRM University, Kattankulathur-603 203, India)

Registered author(s):

    Abstract

    Plasma-enhanced chemical vapor deposition has been used to synthesize diamond-like carbon (DLC) thin films. High purity argon and methane gases were used as precursors for the fabrication of the DLC films. The influence of plasma pretreatment on the growth of the DLC films has been studied by subjecting one of the substrates to plasma pretreatment prior to deposition of the DLC films, while maintaining the other substrate as the control. The structural properties of the DLC films have been characterized using atomic force microscopy and Raman spectroscopy. The film grown on the pretreated substrate shows a more uniform coating as compared to the film grown on non-pretreated silicon substrate. The results are discussed based on diffusivity of carbon on silicon and the effect of the plasma pretreatment.

    Download Info

    If you experience problems downloading a file, check if you have the proper application to view it first. In case of further problems read the IDEAS help page. Note that these files are not on the IDEAS site. Please be patient as the files may be large.
    File URL: http://www.worldscinet.com/cgi-bin/details.cgi?type=pdf&id=pii:S0218625X09013426
    Download Restriction: Access to full text is restricted to subscribers.
    File URL: http://www.worldscinet.com/cgi-bin/details.cgi?type=html&id=pii:S0218625X09013426
    Download Restriction: Access to full text is restricted to subscribers.

    As the access to this document is restricted, you may want to look for a different version under "Related research" (further below) or search for a different version of it.

    Bibliographic Info

    Article provided by World Scientific Publishing Co. Pte. Ltd. in its journal Surface Review and Letters.

    Volume (Year): 16 (2009)
    Issue (Month): 06 ()
    Pages: 881-886

    as in new window
    Handle: RePEc:wsi:srlxxx:v:16:y:2009:i:06:p:881-886

    Contact details of provider:
    Web page: http://www.worldscinet.com/srl/srl.shtml

    Order Information:
    Email:

    Related research

    Keywords: Argon ion; AFM; diamond-like carbon; plasma pretreatment; Raman spectroscopy;

    References

    No references listed on IDEAS
    You can help add them by filling out this form.

    Citations

    Lists

    This item is not listed on Wikipedia, on a reading list or among the top items on IDEAS.

    Statistics

    Access and download statistics

    Corrections

    When requesting a correction, please mention this item's handle: RePEc:wsi:srlxxx:v:16:y:2009:i:06:p:881-886

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: (Tai Tone Lim).

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If references are entirely missing, you can add them using this form.

    If the full references list an item that is present in RePEc, but the system did not link to it, you can help with this form.

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your profile, as there may be some citations waiting for confirmation.

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.