X. Y. YOU () (School of Environmental Science and Engineering, Tianjin University, 300072 Tianjin, China) XIA XIAO (School of Electronic and Information Engineering, Tianjin University, 300072 Tianjin, China)
Abstract
Layered film structures are widely applied. The adhesiveness of thin layer, which controls the product quality, is a key factor to be known. The possibility of applying the surface acoustic waves (SAWs) technique to determine the adhesiveness quality of film and substrate is explored by a theoretical approach, where the interface adhesiveness is modeled by the spring model. Numerical results show that the proposed SAWs technique has a high resolution on determining the interface adhesiveness. Meanwhile, SAWs can also be applied to detect the parameters of film such as the elastic modulus, thickness, density, and Poisson's ratio nondestructively.
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Publisher Info
Article provided by World Scientific Publishing Co. Pte. Ltd. in its journal Surface Review and Letters.