IDEAS home Printed from https://ideas.repec.org/a/eee/phsmap/v207y1994i1p420-426.html
   My bibliography  Save this article

Spectroscopic transmission ellipsometry studies of semiconductor heterostructures

Author

Listed:
  • Ozanyan, K.B.
  • Hunderi, O.

Abstract

Ellipsometry is conventionally used in a reflection configuration, which however is not suitable for the case of p-polarization sensitive modes in high-index samples. In this paper we demonstrate that transmission ellipsometry at the Brewster angle of incidence can be a powerful tool for investigating heterostructures and superlattices, provided s-polarized absorption is negligible. Such a geometry combines the possibility of achieving a greater p-polarized component in the sample, the convinience of measuring at higher signal levels and easier treatment of experimental data.

Suggested Citation

  • Ozanyan, K.B. & Hunderi, O., 1994. "Spectroscopic transmission ellipsometry studies of semiconductor heterostructures," Physica A: Statistical Mechanics and its Applications, Elsevier, vol. 207(1), pages 420-426.
    • Handle: RePEc:eee:phsmap:v:207:y:1994:i:1:p:420-426
    DOI: 10.1016/0378-4371(94)90404-9
    as

    Download full text from publisher

    File URL: http://www.sciencedirect.com/science/article/pii/0378437194904049
    Download Restriction: Full text for ScienceDirect subscribers only. Journal offers the option of making the article available online on Science direct for a fee of $3,000
    File URL: https://libkey.io/10.1016/0378-4371(94)90404-9?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:eee:phsmap:v:207:y:1994:i:1:p:420-426. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Catherine Liu (email available below). General contact details of provider: http://www.journals.elsevier.com/physica-a-statistical-mechpplications/ .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.